Patent Assignment
Reel/Frame 064522/0501
Assignment of Assignor's Interest
Recorded: 2023-08-08
Pages: 5
Assignors
DAO, TRUNG H.
Executed: 2023-07-27
KADIWALA, SAGIR BIPIN
Executed: 2023-07-27
KIM, SAM
Executed: 2023-07-27
TRAN, MINH QUOC
Executed: 2023-07-27
LIU, GU
Executed: 2023-07-27
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Methods, Systems, and Apparatus for Measuring a Gap Between a Support Surface for a Substrate and an Opposing Upper Surface of a Processing Chamber