Patent Assignment
Reel/Frame 064558/0401
Assignment of Assignor's Interest
Recorded: 2023-08-11
Pages: 3
Assignors
YANG, CHANSYUN DAVID
Executed: 2020-08-03
CHANG, KEH-JENG
Executed: 2020-08-03
YANG, CHAN-LON
Executed: 2020-08-03
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Plasma-Assisted Etching Of Metal Oxides