Patent Assignment
Reel/Frame 064595/0850
Assignment of Assignor's Interest
Recorded: 2023-08-15
Pages: 7
Assignors
YOO, SEUNGWAN
Executed: 2023-07-18
LEE, JEONGYEON
Executed: 2023-07-18
KIM, DOHYUNG
Executed: 2023-07-18
PARK, JAEHONG
Executed: 2023-07-18
LIM, DONG-CHAN
Executed: 2023-07-18
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, GYEONGGI-DO, SUWON-SI, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Ion Beam Source, Substrate Process Apparatus Including the Same, and Method of Processing a Substrate Using the Same