Patent Assignment
Reel/Frame 064595/0978
Assignment of Assignor's Interest
Recorded: 2023-08-15
Pages: 3
Assignee
MKS INSTRUMENTS, INC.
2 TECH DRIVE, SUITE 201, ANDOVER, MASSACHUSETTS, 01810
Covered Property
(1)
Methods and Systems for Endpoint Detection in Foreline of Chamber Clean and Foreline Clean Processes
Application:
18/449,488 →
Publication:
US 2024/0063001
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.