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App. No. 18/449,488 · Confirmation No. 3816

METHODS AND SYSTEMS FOR ENDPOINT DETECTION IN FORELINE OF CHAMBER CLEAN AND FORELINE CLEAN PROCESSES

Inventors: Hongke Ye, Gordon Hill
Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2025-03-19 ABN Abandonment 2 View
2024-09-12 CTRS Requirement for Restriction/Election 5 View
2024-09-12 BIB Bibliographic Data Sheet 1 View
2024-02-23 NTC.PUB Notice of Publication 1 View
2023-12-05 REF.OTHER Other reference-Patent/Application/Search Documents 11 View
2023-12-05 N417 Electronic Filing System Acknowledgment Receipt 2 View
2023-12-05 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2023-09-14 M327 Miscellaneous Communication to Applicant - No Action Count 1 View
2023-09-14 APP.FILE.REC Filing Receipt 3 View
2023-09-14 WFEE Fee Worksheet (SB06) 1 View
2023-08-25 APP.FILE.REC Filing Receipt 3 View
2023-08-25 WFEE Fee Worksheet (SB06) 1 View
2023-08-25 NTC.MISS.PRT Notice to File Missing Parts 2 View
2023-08-14 SPEC Specification — View
2023-08-14 DRW Drawings-only black and white line drawings 5 View
2023-08-14 TRNA Transmittal of New Application 2 View
2023-08-14 PA.. Power of Attorney 1 View
2023-08-14 N417 Electronic Filing System Acknowledgment Receipt 3 View
2023-08-14 SPEC Specification 17 View
2023-08-14 CLM Claims 5 View
2023-08-14 ABST Abstract 1 View
2023-08-14 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2023-08-14 ADS Application Data Sheet 8 View
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2023-08-14 OATH Oath or Declaration filed 2 View
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Quick Facts
App. No.
18/449,488
Filed
2023-08-14
Pub. No.
US20240063001A1
Art Unit
1711