IP Library › Patent Application 63371706
Patent Application Provisional
App. No. 63/371,706 · Confirmation No. 5483

METHODS AND SYSTEMS FOR ENDPOINT DETECTION IN FORELINE OF CHAMBER CLEAN AND FORELINE CLEAN PROCESSES

Inventors: Hongke Ye, Gordon Hill
Provisional Application Expired
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 Code Description Pages PDF
2022-10-14 APP.FILE.REC Filing Receipt 3 View
2022-08-26 APP.FILE.REC Filing Receipt 3 View
2022-08-17 N417.PYMT Electronic Fee Payment 2 View
2022-08-17 N417 Electronic Filing System Acknowledgment Receipt 3 View
2022-08-17 SPEC Specification 16 View
2022-08-17 CLM Claims 5 View
2022-08-17 ABST Abstract 1 View
2022-08-17 TR.PROV Provisional Cover Sheet (SB16) 3 View
2022-08-17 ADS Application Data Sheet 8 View
2022-08-17 DRW Drawings-only black and white line drawings 4 View
2022-08-17 SPEC Specification — View
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Quick Facts
App. No.
63/371,706
Filed
2022-08-17