Patent Assignment
Reel/Frame 064597/0336
Assignment of Assignor's Interest
Recorded: 2023-08-15
Pages: 4
Assignors
HU, CHENG-KANG
Executed: 2023-04-24
CHEN, YIN YUAN
Executed: 2023-05-30
WEN, YA-CHIEH
Executed: 2023-05-31
LIU, HSU-SHUI
Executed: 2023-05-31
PAI, JIUN-RONG
Executed: 2023-06-27
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Method and System of Removing Particles from Pellicle