Patent Assignment
Reel/Frame 064606/0204
Assignment of Assignor's Interest
Recorded: 2023-08-16
Pages: 3
Assignors
SCHIER, BURKHART
Executed: 2022-03-06
BRUGGER, MICHAEL
Executed: 2022-03-06
KRAUTZER, WOLFGANG
Executed: 2022-03-18
PASSEGGER, THOMAS
Executed: 2022-03-07
Assignee
LAM RESEARCH AG
SEZ-STRASSE 1, VILLACH, 9500, AUSTRIA
Covered Property
(1)
Apparatus for Processing a Wafer-Shaped Article
Application:
18/277,441 →
Publication:
US 2024/0304489