Patent Assignment
Reel/Frame 064606/0798
Assignment of Assignor's Interest
Recorded: 2023-08-16
Pages: 6
Assignee
SUMCO CORPORATION
1-2-1 SHIBAURA, MINATO-KU, TOKYO, 1058634, JAPAN
Covered Property
(1)
Wafer Storage Container Cleaning Apparatus, and Wafer Storage Container Cleaning Method