Patent Assignment
Reel/Frame 064650/0459
Assignment of Assignor's Interest
Recorded: 2023-08-21
Pages: 8
Assignors
SHIRATANI, MASAHARU
Executed: 2023-07-26
KAMATAKI, KUNIHIRO
Executed: 2023-07-27
KOGA, KAZUNORI
Executed: 2023-07-27
SHINDO, TAKAHIRO
Executed: 2023-07-21
MATSUDO, TATSUO
Executed: 2023-07-21
Assignees
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
KYUSHU UNIVERSITY, NATIONAL UNIVERSITY CORPORATION
744 MOTOOKA, NISHI-KU, FUKUOKA-SHI, FUKUOKA, 819-0395, JAPAN
Covered Property
(1)
Plasma Processing Apparatus, High-Frequency Power Supply Circuit, and Impedance Matching Method