Patent Assignment
Reel/Frame 064652/0964
Assignment of Assignor's Interest
Recorded: 2023-08-21
Pages: 3
Assignor
GWINN, MATTHEW CHARLES
Executed: 2023-07-11
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Process System, Method, and Substrate Chuck
Application:
18/350,610 →
Publication:
US 2025/0022739