Patent Assignment
Reel/Frame 064794/0030
Assignment of Assignor's Interest
Recorded: 2023-09-05
Pages: 3
Assignors
DAHAL, TULASHI
Executed: 2023-08-30
ABEL, PAUL
Executed: 2023-08-30
DEBASU, MENGISTIE
Executed: 2023-08-30
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Methods for Wet Atomic Layer Etching of Molybdenum
Application:
18/240,142 →
Publication:
US 2025/0079180