Patent Assignment
Reel/Frame 064795/0601
Assignment of Assignor's Interest
Recorded: 2023-09-05
Pages: 4
Assignors
OTTO IV, IVO
Executed: 2023-08-09
KANAKI, TOSHIKI
Executed: 2023-08-24
HOLLIN, JONATHAN
Executed: 2023-08-09
KAL, SUBHADEEP
Executed: 2023-08-17
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Etch Selectivity Modulation by Fluorocarbon Treatment