Patent Assignment
Reel/Frame 064798/0731
Assignment of Assignor's Interest
Recorded: 2023-09-05
Pages: 2
Assignor
AISO, FUMIKI
Executed: 2023-04-27
Assignee
KIOXIA CORPORATION
1-21, SHIBAURA 3-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Semiconductor Manufacturing Apparatus, Method of Manufacturing Semiconductor Device and Method of Film Formation