Patent Assignment
Reel/Frame 064809/0685
Assignment of Assignor's Interest
Recorded: 2023-09-06
Pages: 3
Assignor
MORI, KIYOSHI
Executed: 2023-08-17
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 1076325, JAPAN
Covered Property
(1)
Vacuum Processing Apparatus and Tilt Adjustment Method
Application:
18/549,177 →
Publication:
US 2024/0162076