Patent Assignment
Reel/Frame 064828/0472
Assignment of Assignor's Interest
Recorded: 2023-08-29
Pages: 11
Assignor
BERLINER GLAS GMBH
Executed: 2021-12-29
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Measuring Apparatus and Method for Roughness and/or Defect Measurement on a Surface