Patent Assignment
Reel/Frame 064828/0691
Assignment of Assignor's Interest
Recorded: 2023-09-07
Pages: 10
Assignors
AZUMO, SHUJI
Executed: 2023-08-18
IKE, SHINICHI
Executed: 2023-08-21
KAWANO, YUMIKO
Executed: 2023-08-29
MURAKAMI, HIROKI
Executed: 2023-08-18
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 1076325, JAPAN
Covered Property
(1)
Selective Film Formation Using Self-Assembled Monolayer