Patent Assignment
Reel/Frame 064871/0458
Assignment of Assignor's Interest
Recorded: 2023-09-12
Pages: 2
Assignors
SHIRASAKA, TOSHIAKI
Executed: 2023-09-06
SHIBATA, TOMOAKI
Executed: 2023-09-06
FUKUZUMI, SHIZU
Executed: 2023-09-06
Assignee
RESONAC CORPORATION
13-9, SHIBA DAIMON 1-CHOME, MINATO-KU, TOKYO, 105-8518, JAPAN
Covered Property
(1)
Method for Manufacturing Semiconductor Device, Cleaning Device, Cleaning Method, and Semiconductor Device
Application:
18/549,937 →
Publication:
US US20240321818A1
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.