Patent Assignment
Reel/Frame 064896/0110
Assignment of Assignor's Interest
Recorded: 2023-09-13
Pages: 3
Assignors
YEN, HSU TUNG
Executed: 2023-08-30
WANG, LING-SUNG
Executed: 2023-09-12
CHIANG, CHEN-CHIEH
Executed: 2023-08-30
HUANG, BO HSIANG
Executed: 2023-08-30
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
NO.8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, TAIWAN
Covered Property
(1)
System for Monitoring Wafer Carrier and Method of Manufacturing Semiconductor Structure