Patent Assignment
Reel/Frame 064943/0414
Assignment of Assignor's Interest
Recorded: 2023-09-19
Pages: 8
Assignors
IKEDA, TARO
Executed: 2023-08-28
ASHIDA, MITSUTOSHI
Executed: 2023-08-29
KAMATA, EIKI
Executed: 2023-09-06
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus, and Plasma Processing Method