Patent Assignment
Reel/Frame 064956/0869
Assignment of Assignor's Interest
Recorded: 2023-09-19
Pages: 3
Assignee
BROOKS AUTOMATION INC
15 ELIZABETH DRIVE, CHELMSFORD, MASSACHUSETTS, 01824
Covered Property
(1)
Automatic Wafer Centering Method and Apparatus
Application:
18/470,095 →
Publication:
US 2024/0087938
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.