Patent Assignment
Reel/Frame 065745/0763
Assignment of Assignor's Interest
Recorded: 2023-09-19
Pages: 41
Assignor
BROOKS AUTOMATION INC
Executed: 2021-10-01
Assignee
BROOKS AUTOMATION HOLDING, LLC
15 ELIZABETH DRIVE, CHELMSFORD, MASSACHUSETTS, 01824
Covered Property
(1)
Automatic Wafer Centering Method and Apparatus
Application:
18/470,095 →
Publication:
US 2024/0087938
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.