Patent Assignment
Reel/Frame 065069/0732
Assignment of Assignor's Interest
Recorded: 2023-09-29
Pages: 3
Assignor
HONDA, YOSHIYUKI
Executed: 2023-04-21
Assignee
GIGAPHOTON INC.
400, OAZA YOKOKURASHINDEN, OYAMA-SHI, TOCHIGI, 323-8558, JAPAN
Covered Property
(1)
Extreme Ultraviolet Light Generation Chamber Device and Electronic Device Manufacturing Method