Patent Assignment
Reel/Frame 065080/0549
Assignment of Assignor's Interest
Recorded: 2023-09-30
Pages: 3
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Photoresist Underlayer and Method of Manufacturing a Semiconductor Device
Application:
18/231,447 →
Publication:
US 2023/0393474