Patent Assignment
Reel/Frame 065080/0594
Assignment of Assignor's Interest
Recorded: 2023-09-30
Pages: 3
Assignors
ZI, AN-REN
Executed: 2021-05-06
HO, CHUN-CHIH
Executed: 2021-05-05
CHENG, YAHRU
Executed: 2021-06-02
CHANG, CHING-YU
Executed: 2021-05-16
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Method of Manufacturing Semiconductor Devices and Pattern Formation Method