Patent Assignment
Reel/Frame 065082/0524
Assignment of Assignor's Interest
Recorded: 2023-09-30
Pages: 3
Assignor
LIN, YUN-YUE
Executed: 2020-12-25
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Pellicle for an Euv Lithography Mask and a Method of Manufacturing Thereof