Patent Assignment
Reel/Frame 065172/0165
Assignment of Assignor's Interest
Recorded: 2023-10-10
Pages: 3
Assignor
CHAO, BING-SIANG
Executed: 2018-11-06
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Optical Mode Optimization for Wafer Inspection