Patent Assignment
Reel/Frame 065187/0149
Assignment of Assignor's Interest
Recorded: 2023-10-11
Pages: 3
Assignors
CHANG, SHOU-SUNG
Executed: 2020-05-18
SOUNDARARAJAN, HARI
Executed: 2020-05-14
WU, HAOSHENG
Executed: 2020-05-07
TANG, JIANSHE
Executed: 2020-05-07
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Apparatus and Method for Cmp Temperature Control