Patent Assignment
Reel/Frame 065271/0602
Assignment of Assignor's Interest
Recorded: 2023-10-18
Pages: 2
Assignee
AMERICAN AIR LIQUIDE, INC.
200 GBC DRIVE, NEWARK, DELAWARE, 19702
Covered Property
(1)
Etching Methods with Alternating Non-Plasma and Plasma Etching Processes