Patent Assignment
Reel/Frame 065281/0547
Assignment of Assignor's Interest
Recorded: 2023-10-19
Pages: 4
Assignors
CHEN, ZHIYING
Executed: 2023-10-18
CARRUTH, MEGAN
Executed: 2023-10-18
BLAKENEY, JOEL
Executed: 2023-10-18
SRIDHAR, SHYAM
Executed: 2023-10-18
VENTZEK, PETER LOWELL GEORGE
Executed: 2023-10-18
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
System and Method to Measure Ion Properties in a Plasma System