Patent Assignment
Reel/Frame 065391/0593
Assignment of Assignor's Interest
Recorded: 2023-10-30
Pages: 6
Assignors
KIM, JUN YEOB
Executed: 2023-10-17
LIM, WOO YONG
Executed: 2023-10-17
JUNG, JI YUN
Executed: 2023-09-15
Assignees
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, GYEONGGI-DO, SUWON-SI, 16677, KOREA, REPUBLIC OF
AUROS TECHNOLOGY, INC.
15-23 DONGTANSANDAN 6-GIL, GYEONGGI-DO, HWASEONG-SI, 18487, KOREA, REPUBLIC OF
Covered Property
(1)
Device and Method for Overlay Measurement Which Control Focus Movement