Patent Assignment
Reel/Frame 065457/0322
Assignment of Assignor's Interest
Recorded: 2023-11-03
Pages: 8
Assignors
YOON, HYONG SEO
Executed: 2023-10-24
KIM, HYUNBAE
Executed: 2023-11-02
KIM, YEONGUK
Executed: 2023-10-19
KIM, YONGHEE
Executed: 2023-10-24
KIM, HYUNGJUN
Executed: 2023-10-24
JEON, JINA
Executed: 2023-10-24
CHO, JUNGHYUN
Executed: 2023-10-24
HONG, SUNGWOOK
Executed: 2023-10-24
HWANG, WONSUB
Executed: 2023-10-19
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, GYEONGGI-DO, SUWON-SI, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Voltage Waveform Controlling Method, Substrate Processing Method, and Substrate Processing Apparatus
Application:
18/386,931 →
Publication:
US 2024/0170255