Patent Assignment
Reel/Frame 065458/0647
Assignment of Assignor's Interest
Recorded: 2023-11-03
Pages: 3
Assignors
LIN, YI-CHENG
Executed: 2023-05-15
LIAO, KAO-FENG
Executed: 2023-05-18
JANGJIAN, PENG-CHUNG
Executed: 2023-06-01
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Semiconductor Processing Tool and Methods of Operation
Application:
18/323,970 →
Publication:
US 2024/0391049