Patent Assignment
Reel/Frame 065587/0254
Assignment of Assignor's Interest
Recorded: 2023-11-16
Pages: 2
Assignor
SUMI, NORITAKE
Executed: 2010-09-11
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Processing Chamber Cleaning Method, Cleaning Attachment and Substrate Processing System
Application:
18/511,256 →
Publication:
US 2024/0157410
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.