Patent Assignment
Reel/Frame 065589/0482
Assignment of Assignor's Interest
Recorded: 2023-11-16
Pages: 4
Assignors
FULFORD, MARK
Executed: 2023-11-14
GARDNER, MARK I.
Executed: 2023-11-10
FULFORD, H. JIM
Executed: 2023-11-14
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Wafer Support for Measuring Wafer Geometry
Application:
18/511,557 →
Publication:
US 2025/0167024