Patent Assignment
Reel/Frame 065631/0988
Assignment of Assignor's Interest
Recorded: 2023-11-21
Pages: 3
Assignor
KITAMURA, YUJI
Executed: 2020-08-28
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing System and Method of Supporting Plasma Ignition