Assignment of Assignor's Interest

Recorded: 2023-11-27 Pages: 3

Assignors

HETZLER, JOCHEN

Executed: 2023-10-11

SCHULTE, STEFAN

Executed: 2023-10-11

DREHER, MATTHIAS

Executed: 2023-10-19

Assignee

CARL ZEISS SMT GMBH

RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY

Covered Property (1)

Measurement Device for Interferometric Measurement of a Surface Shape

Application: 18/473,713 →

Publication: US 2024/0077305