Patent Assignment
Reel/Frame 065690/0759
Assignment of Assignor's Interest
Recorded: 2023-11-28
Pages: 5
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Exposure Method, Exposure Apparatus, and Method for Manufacturing Article