Patent Assignment
Reel/Frame 065778/0174
Assignment of Assignor's Interest
Recorded: 2023-12-06
Pages: 3
Assignee
SEMES CO., LTD.
77, 4SANDAN 5-GIL, JIKSAN-EUP, SEOBUK-GU, CHEONAN-SI, CHUNGCHEONGNAM-DO, 31040, KOREA, REPUBLIC OF
Covered Property
(1)
Chemical Liquid Supply Module and Substrate Treating Apparatus Including the Same
Application:
18/530,368 →
Publication:
US 2024/0198371