Patent Assignment
Reel/Frame 065787/0083
Assignment of Assignor's Interest
Recorded: 2023-12-07
Pages: 2
Assignor
TAKEDA, NAOAKI
Executed: 2023-06-02
Assignee
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
22-6, MOTO-MACHI, KADOMA-SHI, OSAKA, 571-0057, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method