Patent Assignment
Reel/Frame 065790/0938
Assignment of Assignor's Interest
Recorded: 2023-12-07
Pages: 9
Assignee
KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY
291, DAEHAK-RO, YUSEONG-GU, DAEJEON, 34141, KOREA, REPUBLIC OF
Covered Property
(1)
Dielectric Structure and Substrate Processing Apparatus Including the Same
Application:
18/507,606 →
Publication:
US 2024/0274661
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.