Patent Assignment
Reel/Frame 065807/0767
Assignment of Assignor's Interest
Recorded: 2023-12-08
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing with Phase-Locked Waveforms
Application:
18/516,562 →
Publication:
US 2025/0166966