Patent Assignment
Reel/Frame 065832/0353
Assignment of Assignor's Interest
Recorded: 2023-12-11
Pages: 5
Assignee
KLA CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
System and Method for Vacuum Ultraviolet Lamp Assisted Ignition of Oxygen-Containing Laser Sustained Plasma Sources
Application:
18/535,840 →
Publication:
US 2024/0138048