Patent Assignment
Reel/Frame 065915/0734
Assignment of Assignor's Interest
Recorded: 2023-12-19
Pages: 5
Assignors
MALEEV, IVAN
Executed: 2023-09-22
BHADURI, BASANTA
Executed: 2023-09-22
TUITJE, HOLGER
Executed: 2023-09-23
MIHAYLOV, MIHAIL
Executed: 2023-09-29
TIAN, XINKANG
Executed: 2023-11-09
SONG, DA
Executed: 2023-09-22
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, AKASAKA BIZ TOWER, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Metrology Integrated with Vacuum Processing
Application:
18/478,946 →
Publication:
US 2025/0112065