Patent Assignment
Reel/Frame 065923/0707
Assignment of Assignor's Interest
Recorded: 2023-12-20
Pages: 7
Assignors
KIM, JAEHYUN
Executed: 2023-07-20
ANN, KOOKJIN
Executed: 2023-09-03
GIM, SUJI
Executed: 2023-09-14
SUNG, TAIJONG
Executed: 2023-07-20
YOOK, SUNWOO
Executed: 2023-09-20
HEO, YOUNG
Executed: 2023-07-24
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Exhaust Gas Processing Apparatus Having Plasma Source and Substrate Processing Apparatus Including the Same