Patent Assignment
Reel/Frame 065941/0309
Assignment of Assignor's Interest
Recorded: 2023-12-22
Pages: 4
Assignors
JANG, JOONHWAN
Executed: 2023-12-08
KWON, SOONKAB
Executed: 2023-12-08
LEE, HYOJU
Executed: 2023-12-08
Assignee
SEMES CO., LTD.
77, 4SANDAN 5-GIL, JIKSAN-EUP, SEOBUK-GU, CHEONAN-SI, CHUNGCHEONGNAM-DO, 31040, KOREA, REPUBLIC OF
Covered Property
(1)
Substrate Processing Apparatus and Method of Controlling the Same
Application:
18/394,068 →
Publication:
US 2024/0222153