Patent Assignment
Reel/Frame 065942/0814
Assignment of Assignor's Interest
Recorded: 2023-12-22
Pages: 11
Assignors
KUBOTA, YASUHITO
Executed: 2023-11-15
MIZUNO, YASUSHI
Executed: 2023-11-09
KATO, MASAKI
Executed: 2023-11-14
NISHIMURA, MASAKI
Executed: 2023-11-08
MIZUNO, HITOSHI
Executed: 2023-11-27
Assignee
NIKON CORPORATION
15-3, KONAN 2-CHOME, MINATO-KU, TOKYO, 108-6290, JAPAN
Covered Property
(1)
Spatial Light Modulation Unit and Exposure Apparatus
Application:
18/394,369 →
Publication:
US 2024/0126176