Patent Assignment
Reel/Frame 065956/0749
Assignment of Assignor's Interest
Recorded: 2023-12-26
Pages: 3
Assignor
BILODEAU, STEVEN M.
Executed: 2018-08-28
Assignee
ENTEGRIS, INC.
129 CONCORD ROAD, BILLERICA, MASSACHUSETTS, 01821
Covered Property
(1)
Formulations to Selectively Etch Silicon-Germanium Relative to Silicon