Patent Assignment
Reel/Frame 066037/0432
Assignment of Assignor's Interest
Recorded: 2024-01-05
Pages: 5
Assignors
ZHAO, JINRONG
Executed: 2023-12-27
WANG, SONG
Executed: 2023-12-27
WEI, GANG
Executed: 2023-12-27
XU, JINJI
Executed: 2023-12-27
Assignee
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
NO.8 WENCHANG AVENUE, BEIJING ECONOMIC-TECHNOLOGICAL DEVELOPMENT AREA, BEIJING, 100176, CHINA
Covered Property
(1)
Coil Structure for Generating Plasma and Semiconductor Equipment