Assignment of Assignor's Interest

Recorded: 2024-01-12 Pages: 14

Assignors

FUJITA, AKIRA

Executed: 2021-12-15

GOTO, KYOSEI

Executed: 2021-12-07

ASO, HIROKI

Executed: 2021-12-07

SAIKI, DAISUKE

Executed: 2021-12-07

Assignee

TOKYO ELECTRON LIMITED

3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN

Covered Property (1)

Substrate Processing Method and Substrate Processing Apparatus

Application: 18/411,210 →

Publication: US 2024/0153756